Thin film transistor, manufacturing method of thin film transistor, array substrate and display device

Thin film transistor, manufacturing method of thin film transistor, array substrate and display device

  • CN 103,107,095 A
  • Filed: 01/25/2013
  • Published: 05/15/2013
  • Est. Priority Date: 01/25/2013
  • Status: Active Application
First Claim
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1. the manufacture method of a thin-film transistor, is characterized in that, comprising:

  • Form the polysilicon layer corresponding to active layer zone and storage capacitance bottom electrode zone on substrate;

    Adopt a composition technique and a doping process to form active layer heavily doped region and storage capacitance bottom electrode.

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