A kind of cleaning method of substrate

A kind of cleaning method of substrate

  • CN 103,286,091 B
  • Filed: 06/09/2013
  • Issued: 09/19/2017
  • Est. Priority Date: 06/09/2013
  • Status: Active Grant
First Claim
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1. a kind of cleaning method of substrate, it is characterised in that including:

  • Pre-add heat treatment is carried out to substrate;

    Dissolving cleaning is carried out to pretreated substrate using cleaning agent,Specifically, cleaning agent is sprayed to oneself substrate Jing Guo the pre-heat treatment, the foreign organic matter of substrate surface is dissolved using cleaning agent,The foreign organic matter that will be attached on substrate is thoroughly removed, wherein, the cleaning agent is selected can phase patibhaga-nimitta with the foreign organic matter on substrateMolten cleaning agent;

    Secondary flushing is carried out to the substrate after cleaning,Wherein, the secondary flushing of substrate progress after described pair of cleaning is specifically included:

    Using High Pressure Pure Water or the fluid of high-pressure water vapor twoSubstrate is rinsed,The cleaning agent is the inorganic solvent for the foreign organic matter that can dissolve substrate surface, and the inorganic solvent is ammoniacal liquor and Shui SushuiMixed solution, the volume ratio of the plain water of the ammoniacal liquor and water is:

    1;

    3~2;

    1.

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