Ion source

Ion source

  • CN 103,298,232 A
  • Filed: 03/01/2013
  • Published: 09/11/2013
  • Est. Priority Date: 03/02/2012
  • Status: Active Grant
First Claim
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1. ion source is characterized in that possessing:

  • Vacuum tank is deflated into vacuum;

    Target is configured in the above-mentioned vacuum tank, produces the ion of a plurality of valence mumbers by the irradiation of laser;

    Accelerating electrode is applied in voltage, so that the ion that is produced by above-mentioned target accelerates;

    AndTarget is arranged between above-mentioned target and the above-mentioned accelerating electrode, and is applied in the voltage with the voltage reversal that puts on above-mentioned accelerating electrode.

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