Manufacturing method for large size joint-free nano-sized roller mold

Manufacturing method for large size joint-free nano-sized roller mold

  • CN 103,399,460 A
  • Filed: 08/16/2013
  • Published: 11/20/2013
  • Est. Priority Date: 08/16/2013
  • Status: Active Application
First Claim
Patent Images

1. a large scale and without seam nanoscale roller die manufacture method, is characterized in that,Step 1:

  • make plate motherboard mould;

    Step 2;

    make the roller matrix;

    Prepare a cylindrical roller matrix, and in the Seed Layer of its outside surface adhesion metal material;

    Step 3;

    make trundle work mould;

    Adopt the body of hollow high light transmissive material as matrix,, at its outside surface coating impression materials, utilize and roll the plane nano imprint process, with the nanoscale features figure transfer replication on plate mould to the impression materials of trundle work mould;

    Step 4;

    adopt and roll the contour roll forming nano-imprint process, with the feature pattern transfer replication on trundle work mould impression materials to big roller mould ultra-violet curing impression glue, after removing residual layer and adopt electroforming or sputter or etching technics to produce large scale Metal Contact Rollers mould;

    Step 5;

    the Metal Contact Rollers die surface is processed, applied the thin coating anti-adhesion layers of one deck, obtain large scale and without seam nanoscale Metal Contact Rollers mould.

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