Vertical conveying device of substrate

Vertical conveying device of substrate

  • CN 103,449,179 A
  • Filed: 04/03/2013
  • Published: 12/18/2013
  • Est. Priority Date: 06/01/2012
  • Status: Active Application
First Claim
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1. the vertical carrying device of a substrate is characterized in that possessing:

  • The location loader, have the positioning unit that support member and adjustment load the position of the substrate on this support member;

    The absorption lifting unit, can be adsorbed the substrate loaded on this support member, and made its rising and decline;

    AndPick up the step transport unit, this substrate is carried out to conveyance toward the delineation unit under the state picked up by pick-up member;

    By the down maneuver of this absorption lifting unit, that carries out substrate picks up year changing of step transport unit from this location loader toward this.

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