Polycrystalline silicon rod

Polycrystalline silicon rod

  • CN 103,510,156 A
  • Filed: 06/20/2013
  • Published: 01/15/2014
  • Est. Priority Date: 06/29/2012
  • Status: Active Application
First Claim
Patent Images

1. a polycrystalline silicon rod, has the kind rod of polysilicon formation and the polysilicon of separating out by CVD method at this kind of excellent periphery and separates out body, is used through FZ legal system for the raw material of silicon single-crystal, it is characterized in that,The diameter of described polycrystalline silicon rod is below 77mm,To described polycrystalline silicon rod, during with the cross section of the observation by light microscope axis quadrature excellent with respect to described kind, length is that the occupied area ratio in the following and described cross section of 288 μ

  • m is that more than 78% needle crystal is uniformly distributed radially in described polysilicon is separated out body centered by described kind rod.

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