Methods and apparatus for controlling temperature of a multi-zone heater in a process chamber

Methods and apparatus for controlling temperature of a multi-zone heater in a process chamber

  • CN 103,563,065 A
  • Filed: 05/17/2012
  • Published: 02/05/2014
  • Est. Priority Date: 05/20/2011
  • Status: Active Application
First Claim
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1. a device, described device comprises:

  • Multizone heater, described multizone heater configuration is in substrate support;

    Power supply, described power supply provides the first area of the first power feed to described multizone heater, and described power supply provides the second area of the second power feed to described multizone heater;

    Resistance measurement device, described resistance measurement device is coupled to electric current and the voltage that described the first power feed obtains to measure described first area, and described measurement each interval is at the most in approximately 110 milliseconds;

    AndController, described controller is coupled to described power supply and described resistance measurement device is controlled described power supply with response from the data of described resistance measurement device reception.

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