Apparatus and method for drying substrates

Apparatus and method for drying substrates

  • CN 103,824,757 A
  • Filed: 05/22/2008
  • Published: 05/28/2014
  • Est. Priority Date: 05/23/2007
  • Status: Active Application
First Claim
Patent Images

1. a method for dry substrate, comprising:

  • Last stage, in the described last stage, spray hot fluid to improve the temperature of this substrate to substrate bottom surface, spray organic solvent to the upper surface of rotary plate simultaneously.

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