Semiconductor manufacturing apparatus and manufacturing method of semiconductor device

Semiconductor manufacturing apparatus and manufacturing method of semiconductor device

  • CN 103,972,045 A
  • Filed: 10/23/2013
  • Published: 08/06/2014
  • Est. Priority Date: 01/25/2013
  • Status: Active Application
First Claim
Patent Images

1. a semiconductor manufacturing facility, comprising:

  • Chamber;

    Chemical agent supply portion, to supply with hydrophober or organic solvent with the surface of the clean Semiconductor substrate of clean liquid in described chamber;

    AndSpout part, is ejected into the water capturing agent of catching water in the atmosphere in described chamber.

View all claims
    ×
    ×

    Thank you for your feedback

    ×
    ×