Demagnetization of magnetic media by c doping for hdd patterned media application

Demagnetization of magnetic media by c doping for hdd patterned media application

  • CN 103,975,388 A
  • Filed: 12/13/2012
  • Published: 08/06/2014
  • Est. Priority Date: 12/16/2011
  • Status: Active Application
First Claim
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1. a method that forms patterned magnetic substrate, comprises:

  • On the mangneto activated surface of substrate, form patterning photoresist, wherein said patterning photoresist limits the expose portion of described mangneto activated surface;

    By described exposure of substrates in carbon plasma;

    Carbon ion from described carbon plasma is injected in the described expose portion of described mangneto activated surface;

    WithBy described exposure of substrates is removed to described patterning photoresist in oxygen plasma.

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