Electrical Connectors and Methods for Forming the Same

Electrical Connectors and Methods for Forming the Same

  • CN 104,037,091 A
  • Filed: 07/17/2013
  • Published: 09/10/2014
  • Est. Priority Date: 03/08/2013
  • Status: Active Grant
First Claim
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1. a method, comprising:

  • Metal under projection (UBM) layer top applies photoresist;

    The described photoresist that exposes, wherein in described step of exposure, the light quantity that arrives the bottom of described photoresist be less than the end face that arrives described photoresist light quantity approximately 5%;

    Develop described photoresist to form opening in described photoresist, wherein expose a part for described UBM layer by described opening, and the bottom transverse size of described opening is greater than top cross size;

    AndIn described opening, form electrical connector, described electrical connector can not reflux.

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