Analyser arrangement for particle spectrometer

Analyser arrangement for particle spectrometer

  • CN 104,040,681 A
  • Filed: 03/06/2012
  • Published: 09/10/2014
  • Est. Priority Date: 03/06/2012
  • Status: Active Application
First Claim
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1. for determining a method at least one parameter relevant to send charged particle that sample (11) sends from particle, said method comprising the steps of:

  • -the particle beams the scioptics system (13) that form described charged particle sent between sample (11) and the entrance (8) of measured zone (3) and transmitted described particle at described particle, and described lens combination has substantially straight optical axis (15);

    -before the described particle beams enters described measured zone, make the described particle beams at least the first coordinate direction (x, y) upper deflecting of the optical axis perpendicular to described lens combination;

    And-detect the position of described charged particle in described measured zone, at least one parameter described in described positional representation, it is characterized in that, described method is further comprising the steps;

    before the described particle beams enters in described measured zone, make the deflection at least for the second time on same at least the first coordinate direction (x, y) of the described particle beams.

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