Analyser arrangement for particle spectrometer

Analyser arrangement for particle spectrometer

  • CN 104,040,681 B
  • Filed: 03/06/2012
  • Issued: 04/26/2017
  • Est. Priority Date: 03/06/2012
  • Status: Active Grant
First Claim
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1. a kind of method for determining at least one related parameter of charged particle that sample (11) sends is sent from particle,The method comprising the steps of:

  • - form the particle beams of the charged particle and sample (11) and measurement zone are sent in the particle by lens combination (13)The particle is transmitted between the entrance (8) in domain (3), the lens combination has straight optical axis (15);

    - before the particle beams enters the measured zone, the particle beams is made in the optical axis perpendicular to the lens combinationAt least the first coordinate direction (x, y) upper deflecting;

    AndPosition of-detection the charged particle in the measured zone, at least one parameter described in the positional representation,Wherein, the step of position for detecting the charged particle, includes that detect the position in two dimensions, one of them represents instituteThe energy of particle is stated, another represents the prime direction or original position of the particle,Characterized in that, methods described is further comprising the steps:

    Before the particle beams is entered in the measured zone,The particle beams is deflected at least second on same at least the first coordinate direction (x, y), and control the particle beamsDeflection so that form the predetermined portions (A, B) at angle distribution (39) of the particle of the particle beams by the measured zone (3)A series of entrance (8), wherein different predetermined portions are continuously recorded.

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