Purification of trichlorosilane

Purification of trichlorosilane

  • CN 104,080,735 A
  • Filed: 11/02/2012
  • Published: 10/01/2014
  • Est. Priority Date: 11/02/2011
  • Status: Active Application
First Claim
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1. from the composition that comprises trichlorosilane, remove at least one boracic pollutent to form a method for the purified product that comprises trichlorosilane, the method comprises the following steps:

  • I) from said composition, part is removed boracic pollutent to form the partial purification composition that comprises trichlorosilane;

    AndIi) see through side inlet by this partial purification composition feed-in purification column and from this purification columnA) see through top exit, remove top boracic contaminant stream,B) see through outlet at bottom, remove bottom boracic contaminant stream, andC) see through side exit, remove the purified composition that comprises trichlorosilane.

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