System for and method of monitoring flow through mass flow controllers in real time

System for and method of monitoring flow through mass flow controllers in real time

  • CN 104,114,982 A
  • Filed: 01/09/2013
  • Published: 10/22/2014
  • Est. Priority Date: 01/20/2012
  • Status: Active Application
First Claim
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1. a mass flow controller, comprising:

  • First flow meter, it is constructed and arranged to measure the flow rate through the quality of described mass flow controller;

    The second flowmeter, it is constructed and arranged to measure the flow rate through the quality of described mass flow controller;

    Operation valve, it is constructed and arranged in response to controlling the flow rate through the quality of described mass flow controller according to the control signal being produced by the measured flow rate of one of described flowmeter;

    AndSystem controller, it is constructed and arranged to produce described control signal, and provides instruction in the flow rate by the measured quality of described first flow meter with while exceeding threshold value by the difference between the flow rate of the measured quality of described the second flowmeter.

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