Titanium nanom column structure preparation method based on plasma etching

Titanium nanom column structure preparation method based on plasma etching

  • CN 104,163,397 A
  • Filed: 07/17/2014
  • Published: 11/26/2014
  • Est. Priority Date: 07/17/2014
  • Status: Active Application
First Claim
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1. based on plasma etching, prepare a method for titanium nano-pillar structure, its step comprises:

  • 1) titanium sheet is put into plasma etching system reative cell, then reative cell is vacuumized and passed into etching gas;

    2) the dull and stereotyped power of setting plasma etching system is 50~

    150W, utilizes plasma to react and carry out etching with titanium sheet, obtains titanium nano-pillar structure.

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