Substrate removal from a carrier

Substrate removal from a carrier

  • CN 104,167,350 A
  • Filed: 05/05/2014
  • Published: 11/26/2014
  • Est. Priority Date: 05/15/2013
  • Status: Active Application
First Claim
Patent Images

1. a method, comprising:

  • At least one part to substrate applies release agent;

    Transmit described substrate to carrier;

    AndRemove described at least one part of described substrate from described carrier.

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