Method for producing metal oxide film and metal oxide film

Method for producing metal oxide film and metal oxide film

  • CN 104,220,375 A
  • Filed: 03/28/2012
  • Published: 12/17/2014
  • Est. Priority Date: 03/28/2012
  • Status: Active Application
First Claim
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1. a manufacture method for metal oxide film, is characterized in that, possesses:

  • (A) by the operation that the solution (7) containing metal alkylide is sprayed to the substrate (1) in antivacuum lower configuration,(B) when described operation (A), to the operation of the dopant solution (5) of described substrate spraying containing the doping agent be made up of mineral compound.

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