Physical quantity sensor, electronic device and moving body

Physical quantity sensor, electronic device and moving body

  • CN 104,345,174 A
  • Filed: 08/06/2014
  • Published: 02/11/2015
  • Est. Priority Date: 08/06/2013
  • Status: Active Application
First Claim
Patent Images

1. a physical quantity transducer, is characterized in that, has:

  • Substrate;

    First movable body, it is configured on described substrate, and can carry out displacement around the first bolster, and possesses the first movable electrode portion;

    Second movable body, it is configured on described substrate, and can carry out displacement around the second bolster, and possesses the second movable electrode portion,Fixed electorde portion, it is configured on described substrate in the mode overlapping with described first movable electrode portion and described second movable electrode portion when top view.

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