Apparatus and method for detecting position of wafer

Apparatus and method for detecting position of wafer

  • CN 104,396,003 A
  • Filed: 05/02/2012
  • Published: 03/04/2015
  • Est. Priority Date: 05/02/2012
  • Status: Active Application
First Claim
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1. whether correct a position of silicon wafer checkout gear, detect the position of silicon chip on wafer chuck, it is characterized in that, comprising:

  • Camera, the edge of the silicon chip during described camera shooting rotates is to obtain view data;

    Converting unit, described converting unit receives the view data from camera, and converts the view data of reception to some pixel value;

    Comparing unit, the pixel value that converting unit is changed by described comparing unit compares with predetermined reference pixel value, and obtains comparative result;

    Determining means, according to the comparative result of comparing unit, described determining means determines that whether the position of silicon chip is correct.

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