Position of silicon wafer detection device and method

Position of silicon wafer detection device and method

  • CN 104,396,003 B
  • Filed: 05/02/2012
  • Issued: 05/17/2019
  • Est. Priority Date: 05/02/2012
  • Status: Active Grant
First Claim
Patent Images

1. whether correct a kind of position of silicon wafer detection device detects position of the silicon wafer on wafer chuck characterized by comprisingCamera, the camera shooting is with the edge of the silicon wafer in the rotation of the first setting speed to obtain image data;

  • Converting unit, the converting unit receives the image data from camera, and if being converted into received image dataDry pixel value;

    Comparing unit, the pixel value that the comparing unit converts converting unit compared with predetermined reference pixel value, andObtain comparison result;

    Determining means, the determining means determine whether the position of silicon wafer is correct according to the comparison result of comparing unit,Wherein the reference pixel value is by the way that a silicon wafer is placed on the correct position of wafer chuck and sets silicon wafer with secondRotational speed is determined to obtain, and first setting speed is identical as second setting speed.

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