Optical sensing device and optical sensing method based on micro-electromechanical system

Optical sensing device and optical sensing method based on micro-electromechanical system

  • CN 104,501,842 A
  • Filed: 12/08/2014
  • Published: 04/08/2015
  • Est. Priority Date: 12/08/2014
  • Status: Active Application
First Claim
Patent Images

1. based on an optical sensing means for MEMS (micro electro mechanical system), it is characterized in that, comprising:

  • Light source, for output photon signal;

    Micro electronmechanical unit, comprise interconnective paratonic movement module and light change module, described paratonic movement module is for responding to external information and carrying out machinery change according to external information, described light becomes module for changing the physical features of photon signal, and described light becomes module and carries out machinery change by the drive of paratonic movement module;

    Light receiving unit, converts electric signal to for the photon signal that receives by micro electronmechanical unit;

    Described micro electronmechanical unit is connected with light source and light receiving unit respectively.

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