Roughened substrate support

Roughened substrate support

  • CN 104,508,180 A
  • Filed: 07/12/2013
  • Published: 04/08/2015
  • Est. Priority Date: 07/27/2012
  • Status: Active Application
First Claim
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1. form a method for the substrate support of roughening, comprising:

  • In the first technique, carry out spray pearl to the surface of substrate support, wherein said pearl body has the first grit size;

    AndIn the second technique, carry out spray pearl to the described surface of described substrate support, wherein said pearl body has the second grit size, and described second grit size is less than described first grit size.

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