Target material thickness measurement device

Target material thickness measurement device

  • CN 104,613,844 A
  • Filed: 02/05/2015
  • Published: 05/13/2015
  • Est. Priority Date: 02/05/2015
  • Status: Active Application
First Claim
Patent Images

1. an its thickness measurement mechanism, comprising:

  • Support;

    AndBe installed on support and the multiple range cells arranged along first direction, described multiple range cells is respectively used to the thickness measuring target multiple points in a first direction.

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