Micro temperature sensor chip provided with tungsten-rhenium film thermocouple and manufacturing method of chip
Micro temperature sensor chip provided with tungsten-rhenium film thermocouple and manufacturing method of chip
- CN 104,655,306 A
- Filed: 02/12/2015
- Published: 05/27/2015
- Est. Priority Date: 02/12/2015
- Status: Active Application
- EN CH
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- Pin
