Micro temperature sensor chip provided with tungsten-rhenium film thermocouple and manufacturing method of chip

Micro temperature sensor chip provided with tungsten-rhenium film thermocouple and manufacturing method of chip

  • CN 104,655,306 A
  • Filed: 02/12/2015
  • Published: 05/27/2015
  • Est. Priority Date: 02/12/2015
  • Status: Active Application
First Claim
Patent Images

1. a miniature W-Re thin-film thermocouple temperature sensor chip, it is characterized in that:

  • comprise silicon carbide substrate (1) and be bonded in the film thermocouple in silicon carbide substrate (1) front, film thermocouple is made up of W-Re galvanic couple film positive pole (2) and W-Re galvanic couple film cathode (3);

    W-Re galvanic couple film positive pole (2) and W-Re galvanic couple film cathode (3) are connected with prolongation property compensating line negative pole (6) with prolongation property compensating line positive pole (5) respectively.

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