Using piezoelectric sixdimension power/torque sensor of 6 groups of dynamometry sensing units
Using piezoelectric sixdimension power/torque sensor of 6 groups of dynamometry sensing units
 CN 104,677,543 B
 Filed: 01/29/2015
 Issued: 11/29/2019
 Est. Priority Date: 01/29/2015
 Status: Active Grant
First Claim
1. using piezoelectric sixdimension power/torque sensor of 6 groups of dynamometry sensing units, including it is internal with mounting disc (91) and outerPortion has the pedestal (9) of output electrode socket (13), the dynamometry sensing unit being mounted on the internal mounting disc (91) of the pedestal (9)(j0), the insulated electro of the two panels up and down pole plate (141,142) of the dynamometry sensing unit (j0) is clamped；
 It is pressed on an insulated electro pole plate(141) upper cover (10) on connects output electrode on the electrode and pedestal (9) on two panels insulated electro pole plate (141,142) and insertsThe signal leadout wire (12) of seat (13), for fixing and being dielectrically separated from the insulation filling material (11) of signal leadout wire (12), InInner seal sleeve (15) connecting the two at the inner hole of upper cover (10) and pedestal (9)；
Wherein, the dynamometry sensing unit (j0)It is made of several bauerite chips, these quartz wafers are evenly distributed on the seat of the threedimensional right angle on sensor base mounting disc (91)In mark system X, Y plane on circumference of the Z axis by the circle of reference (ck) in its center of circle；
In the two panels insulated electro pole platePaired electrode on the inside of (141,142) is corresponding with each quartz wafer；
The quartz wafer (j1~j6) for constituting the dynamometry sensing unit (j0) has six, the insulated electro pole plate (141,142)The paired electrode (d1~d6) of inside has six pairs；
Have in this six bauerites chip three pieces be Y (0 °
) cut type quartz wafer (j1, j3,J5), another three pieces are X (0 °
) cut type quartz wafer (j2, j4, j6), and first Y (0 °
) cut type quartz wafer (j1) is arranged in describedOn the circumference of circle of reference (ck), the angle that the line of the center wafer point and the threedimensional cartesian coordinate system origin deviates Xaxis isα
, remaining five bauerite chip are successively alternately uniformly placed on the circumference of the circle of reference (ck) according to cut type difference, so thatAdjacent two panels quartz wafer is 60 °
to the angle of the threedimensional cartesian coordinate system origin, and cut type is different, and each dynamometry is sensitive singleThe position of member is not in the reference axis of the threedimensional cartesian coordinate system；
It is each in three pieces Y (0 °
) cut type quartz wafer (j1, j3, j5)From wafer threedimensional rectangular coordinate system in, Z axis of the Yaxis with the threedimensional cartesian coordinate system in the sensor base mounting discIn parallel, Xaxis is arranged in the same direction counterclockwise or clockwise along the circumference of the circle of reference (ck)；
In three pieces X (0 °
) cut type stoneIn the respective wafer threedimensional rectangular coordinate system of English chip (j2, j4, j6), Xaxis is and in the sensor base mounting discThe Z axis of threedimensional cartesian coordinate system is parallel, circumference counterclockwise or clockwise in the same direction cloth of the Yaxis along the circle of reference (ck)It sets；
Six pairs of electrodes (d1~d6) on the inside of the two panels insulated electro pole plate (141,142) up and down constitute six signal output ends(Q1~Q6), and connect respectively by signal leadout wire (12) with a corresponding output electrode socket (13)；
Obtaining can be by the following method by dynamometry/torque six direction magnitude;
directly by six signal output ends (Q1~Q6)Output valve multiply with sixdimensional force/torque sensor calibration matrix right side, can be obtained by dynamometry/torque six direction powerThe magnitude of component F x, Fy, Fz and moment components Mx, My, Mz；
The calibration matrix constructs in the following way;
first applying the known unit power or power of single different directions for six times respectivelySquare obtains one group of column vector being made of six signal value outputs every time, this six groups of column vectors constitute a six rank square matrixes；
It pressesA six rank diagonal matrix are provided according to known unit power/torque corresponding to each column of six sides rank matrix, six rank is to angular momentElement on battle array leading diagonal is known unit power/torque for being applied；
The six rank square matrixes that sensor output value is constituted are askedThe inverse rear right side multiplies six rank diagonal matrix and calibration matrix just can be obtained.
Chinese PRB Reexamination
Abstract
The invention discloses a kind of piezoelectric sixdimension power/torque sensors using 6 groups of dynamometry sensing units, belong to multiple dimension force/moment measuring device.Including the pedestal with mounting disc and output electrode socket, six groups are clamped the dynamometry sensing unit being uniformly distributed in the pedestal mounting disc by the alternating that two kinds of cut type piezoelectric quartz crystal plates are constituted by upper and lower two panels insulated electro pole plate, upper cover, inner seal sleeve, signal leadout wire and insulation filling material；Wherein first dynamometry sensing unit deviates one angle [alpha] of Xaxis；There is the paired electrode corresponding to quartz wafer on the inside of insulated electro pole plate, each pair of electrode is connect by signal leadout wire with the output electrode socket on pedestal.The present invention has the advantages that simple and compact for structure, irredundant sensing unit, rigidity are big, dynamic property is good, is easy to microminaturization, manufacturing cost is low, few to sensor output signal conditioning circuit demand, can be used for the multiple fields such as intelligent robot, automatic detection, aerospace, machining.
2 Claims

1. using piezoelectric sixdimension power/torque sensor of 6 groups of dynamometry sensing units, including it is internal with mounting disc (91) and outerPortion has the pedestal (9) of output electrode socket (13), the dynamometry sensing unit being mounted on the internal mounting disc (91) of the pedestal (9)(j0), the insulated electro of the two panels up and down pole plate (141,142) of the dynamometry sensing unit (j0) is clamped；
 It is pressed on an insulated electro pole plate(141) upper cover (10) on connects output electrode on the electrode and pedestal (9) on two panels insulated electro pole plate (141,142) and insertsThe signal leadout wire (12) of seat (13), for fixing and being dielectrically separated from the insulation filling material (11) of signal leadout wire (12), InInner seal sleeve (15) connecting the two at the inner hole of upper cover (10) and pedestal (9)；
Wherein, the dynamometry sensing unit (j0)It is made of several bauerite chips, these quartz wafers are evenly distributed on the seat of the threedimensional right angle on sensor base mounting disc (91)In mark system X, Y plane on circumference of the Z axis by the circle of reference (ck) in its center of circle；
In the two panels insulated electro pole platePaired electrode on the inside of (141,142) is corresponding with each quartz wafer；The quartz wafer (j1~j6) for constituting the dynamometry sensing unit (j0) has six, the insulated electro pole plate (141,142)The paired electrode (d1~d6) of inside has six pairs；
Have in this six bauerites chip three pieces be Y (0 °
) cut type quartz wafer (j1, j3,J5), another three pieces are X (0 °
) cut type quartz wafer (j2, j4, j6), and first Y (0 °
) cut type quartz wafer (j1) is arranged in describedOn the circumference of circle of reference (ck), the angle that the line of the center wafer point and the threedimensional cartesian coordinate system origin deviates Xaxis isα
, remaining five bauerite chip are successively alternately uniformly placed on the circumference of the circle of reference (ck) according to cut type difference, so thatAdjacent two panels quartz wafer is 60 °
to the angle of the threedimensional cartesian coordinate system origin, and cut type is different, and each dynamometry is sensitive singleThe position of member is not in the reference axis of the threedimensional cartesian coordinate system；
It is each in three pieces Y (0 °
) cut type quartz wafer (j1, j3, j5)From wafer threedimensional rectangular coordinate system in, Z axis of the Yaxis with the threedimensional cartesian coordinate system in the sensor base mounting discIn parallel, Xaxis is arranged in the same direction counterclockwise or clockwise along the circumference of the circle of reference (ck)；
In three pieces X (0 °
) cut type stoneIn the respective wafer threedimensional rectangular coordinate system of English chip (j2, j4, j6), Xaxis is and in the sensor base mounting discThe Z axis of threedimensional cartesian coordinate system is parallel, circumference counterclockwise or clockwise in the same direction cloth of the Yaxis along the circle of reference (ck)It sets；
Six pairs of electrodes (d1~d6) on the inside of the two panels insulated electro pole plate (141,142) up and down constitute six signal output ends(Q1~Q6), and connect respectively by signal leadout wire (12) with a corresponding output electrode socket (13)；Obtaining can be by the following method by dynamometry/torque six direction magnitude;
directly by six signal output ends (Q1~Q6)Output valve multiply with sixdimensional force/torque sensor calibration matrix right side, can be obtained by dynamometry/torque six direction powerThe magnitude of component F x, Fy, Fz and moment components Mx, My, Mz；The calibration matrix constructs in the following way;
first applying the known unit power or power of single different directions for six times respectivelySquare obtains one group of column vector being made of six signal value outputs every time, this six groups of column vectors constitute a six rank square matrixes；
It pressesA six rank diagonal matrix are provided according to known unit power/torque corresponding to each column of six sides rank matrix, six rank is to angular momentElement on battle array leading diagonal is known unit power/torque for being applied；
The six rank square matrixes that sensor output value is constituted are askedThe inverse rear right side multiplies six rank diagonal matrix and calibration matrix just can be obtained.
 It is pressed on an insulated electro pole plate(141) upper cover (10) on connects output electrode on the electrode and pedestal (9) on two panels insulated electro pole plate (141,142) and insertsThe signal leadout wire (12) of seat (13), for fixing and being dielectrically separated from the insulation filling material (11) of signal leadout wire (12), InInner seal sleeve (15) connecting the two at the inner hole of upper cover (10) and pedestal (9)；

2. piezoelectric sixdimension power/torque sensor according to claim 1 using 6 groups of dynamometry sensing units, featureBe according to the structure of the sensor design and basic mechanical principle determine characterization by six output signals of dynamometry/torque byGenerate according to following method:
 force component Fx, Fy by dynamometry/torque in X, Ydirection pass to distribution by sensor upper cover (10)On sensor base mounting disc (91) positioned at threedimensional cartesian coordinate system X/Y plane three pieces Y (0 °
) cut type quartz wafer (j1,J3, j5), and corresponding output valve is generated at corresponding signal output end (Q1, Q3, Q5), and by dynamometry/torque in X, YdirectionForce component Fx, Fy with by both dynamometry/moment loading point and the upper surface three pieces X (0 °
) cut type quartz wafer (j2, j4, j6) itBetween distance generate a torque so that the corresponding signal output end of three pieces X (0 °
) cut type quartz wafer (j2, j4, j6) (Q2,Q4, Q6) also generate corresponding output valve；
Moment components Mx, My by dynamometry/torque around X, Ydirection pass through sensor upper cover (10)Pass to three pieces X (0 °
) cut type quartz being distributed on sensor base mounting disc (91) positioned at threedimensional cartesian coordinate system X/Y planeChip (j2, j4, j6), and generate corresponding output valve at corresponding signal output end (Q2, Q4, Q6), and by dynamometry/torque aroundX, moment components Mx, My of Ydirection generate one and the threedimensional cartesian coordinate system XY on sensor base mounting disc (91) simultaneouslyThe parallel power of plane passes to three pieces Y (0 °
) cut type quartz wafer (j1, j3, j5) by sensor upper cover (10), and in correspondenceSignal output end (Q1, Q3, Q5) also generate corresponding output valve；
Force component Fz by dynamometry/torque in Zdirection passes through sensorUpper cover (10) passes to the three pieces X (0 °
) for being distributed in and being located at threedimensional cartesian coordinate system X/Y plane on sensor base mounting disc (91)Cut type quartz wafer (j2, j4, j6), and corresponding output valve is generated at corresponding signal output end (Q2, Q4, Q6), and three pieces YThe corresponding signal output end (Q1, Q3, Q5) of (0 °
) cut type quartz wafer (j1, j3, j5) does not have output valve；
By dynamometry/torque around ZThe moment components Mz in direction, which passes to be distributed on sensor base mounting disc (91) by sensor upper cover (10), is located at threedimensionalThree pieces Y (0 °
) cut type quartz wafer (j1, j3, j5) of rectangular coordinate system X/Y plane, and corresponding signal output end (Q1, Q3,Q5) the corresponding output valve of generation, and the corresponding signal output end (Q2, Q4, Q6) of three pieces X (0 °
) cut type quartz wafer (j2, j4, j6)There is no output valve.
 force component Fx, Fy by dynamometry/torque in X, Ydirection pass to distribution by sensor upper cover (10)On sensor base mounting disc (91) positioned at threedimensional cartesian coordinate system X/Y plane three pieces Y (0 °
Specification(s)