Cobalt-containing doped silicon dioxide nano-composite abrasive grain sol and preparation method thereof, and polishing solution and preparation method thereof

Cobalt-containing doped silicon dioxide nano-composite abrasive grain sol and preparation method thereof, and polishing solution and preparation method thereof

  • CN 104,694,081 A
  • Filed: 03/23/2015
  • Published: 06/10/2015
  • Est. Priority Date: 03/23/2015
  • Status: Active Application
First Claim
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1. containing cobalt doped silica nanometer Compostie abrasive particles colloidal sol, it is characterized in that, be the cobalt nitrate solution of 0.43 wt% and the silicate solution of the 2.5 wt% mass ratio by 1:

  • 1 by mass percent, add 1 wt% sodium hydroxide simultaneously, be deposited in reaction in silica-seed by coprecipitation method to make, nano combined abrasive particle in described colloidal sol is uniform-spherical, and the cobaltous hydroxide doping in described colloidal sol is 0.1 wt%-5 wt%.

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