Covering frame support

Covering frame support

  • CN 104,704,141 B
  • Filed: 09/16/2013
  • Issued: 08/28/2020
  • Est. Priority Date: 10/18/2012
  • Status: Active Grant
First Claim
Patent Images

1. A processing device, comprising:

  • a chamber body having an interior defined by a plurality of walls, at least one of the walls having an opening therethrough;

    a substrate support;

    a first shadow frame support extending from a first wall of the plurality of walls and having a first length that is less than a length of the first wall;

    a second shadow frame support extending from a second wall of the plurality of walls and having a second length that is less than the length of the second wall;

    a third shadow frame support extending from a third wall of the walls and having a third length that is less than the length of the third wall; and

    a fourth shadow frame support extending from a fourth wall of the walls and having a fourth length that is less than the length of the fourth wall,a shadow frame disposed on the first shadow frame support, the second shadow frame support, the third shadow frame support, the fourth shadow frame support, or the substrate support;

    wherein the first, second, third, and fourth shadow frame supports are configured to direct cleaning gas radicals (radicals) only toward corners of the chamber body when the shadow frame is positioned over the substrate support and the first, second, third, and fourth shadow frame supports.

View all claims
    ×
    ×

    Thank you for your feedback

    ×
    ×