Epitaxial chamber with customizable flow injection

Epitaxial chamber with customizable flow injection

  • CN 104,756,231 A
  • Filed: 10/08/2013
  • Published: 07/01/2015
  • Est. Priority Date: 10/26/2012
  • Status: Active Application
First Claim
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1. , for the treatment of a gas syringe for chamber, comprising:

  • First group of outlet, described first group of outlet provides the subscript that has of the first process gas to be incident upon plane surface with an angle;

    WithSecond group of outlet, adjacent described first group of outlet, described second group of outlet provides the pressurization laminar flow of the second process gas haply along described plane surface, described plane surface is orthogonal to described second group of outlet and extends.

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