Cholate photoacid generators and photoresists comprising the same

Cholate photoacid generators and photoresists comprising the same

  • CN 104,761,608 A
  • Filed: 12/10/2010
  • Published: 07/08/2015
  • Est. Priority Date: 12/10/2009
  • Status: Active Application
First Claim
Patent Images

1. a light acid propellant compound, described compound is selected from:

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