Silicon substrate in conjunction with biometrics method

Silicon substrate in conjunction with biometrics method

  • CN 104,871,302 B
  • Filed: 12/27/2013
  • Issued: 04/05/2019
  • Est. Priority Date: 02/15/2013
  • Status: Active Grant
First Claim
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1. a kind of silicon substrate in conjunction with biometrics method, be after carrying out chemical passivation processing to the surface of silicon substrate,Measure the method in conjunction with the service life, which is characterized in thatDuring terminating from chemical passivation processing to the measurement in conjunction with the service life, at least carry out protecting the silicon substrateThe ultraviolet protection not irradiated by ultraviolet light is handled, also, carries out the chemical passivation processing to institute in the environment of by shadingThe measurement in conjunction with the service life is stated, the ultraviolet protection processing is thus carried out.

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