Chip image recognition device and method

Chip image recognition device and method

  • CN 104,900,558 A
  • Filed: 05/21/2015
  • Published: 09/09/2015
  • Est. Priority Date: 05/21/2015
  • Status: Active Application
First Claim
Patent Images

1. a chip image recognition device, it is characterized in that, comprise the first driving mechanism (1), the first conduction mechanism (2), the first guide rail (3), the first motion platform (4), the second driving mechanism (5), the second conduction mechanism (6), the second guide rail (7), the second motion platform (8), wafer (9), camera head (10) and display unit (11);

  • Described first driving mechanism (1) drives described first motion platform (4) to move along first direction on described first guide rail by described first conduction mechanism (2), and described second driving mechanism (5) drives described second motion platform (8) to move along second direction on described second guide rail by described second conduction mechanism (6);

    Described first direction of motion is perpendicular to described second direction of motion;

    Described wafer (9) is fixed on described chip image recognition device, and follows described first motion platform (4) and described second motion platform (8) and move upward at described first direction and described second party;

    Described camera head (10) is arranged at described wafer (9) top, for while real time shooting multiple described wafer (9) image;

    Described display unit (11) is connected to described camera head (10), for showing the image that described camera head (10) absorbs.

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