Bottom anti-reflection composition based on molecular glass containing polyhydroxy structure and application thereof

Bottom anti-reflection composition based on molecular glass containing polyhydroxy structure and application thereof

  • CN 104,914,672 B
  • Filed: 06/11/2015
  • Issued: 08/21/2020
  • Est. Priority Date: 06/11/2015
  • Status: Active Grant
First Claim
Patent Images

1. A bottom antireflective coating composition comprising:

  • a molecular glass compound containing more than two hydroxyl structures, a vinyl ether compound containing more than two vinyl ether end caps, and an optional photoacid generator,wherein the molecular glass compound has a structure shown in the following general formulas (I), (II), (III) and (IV);

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