Thin film treatment apparatus

Thin film treatment apparatus

  • CN 105,032,320 A
  • Filed: 06/13/2008
  • Published: 11/11/2015
  • Est. Priority Date: 06/21/2007
  • Status: Active Application
First Claim
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1. a film processing device (8), comprises the rotor (16) with at least one cylindrical section (26), at least one scraper blade (32,33,34,35,36,41) be disposed on described cylindrical section, described scraper blade comprises at least two teeth (42,43,44,42'"'"', 43'"'"', 44'"'"'), described tooth is spaced separately, form gap thusIt is characterized in that, the length (L) of a tooth (41) and be positioned at described tooth adjacent place gap length (G) between average ratio V be correspondingly greater than 2:

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