Solar cell with selectively doped conductive oxide layer and method of making the same

Solar cell with selectively doped conductive oxide layer and method of making the same

  • CN 105,074,937 A
  • Filed: 03/10/2014
  • Published: 11/18/2015
  • Est. Priority Date: 03/12/2013
  • Status: Active Application
First Claim
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1. prepare the method through coated substrate, this substrate has coating and alloy is selectively distributed in this coating, and the method comprises the following steps:

  • Coating precursor material is supplied to the coating unit that multiple unit chemical vapour phase deposition coating covers machine;

    Dopant precursor material is supplied to the coating unit that multiple unit chemical vapour phase deposition coating covers machine;

    Control the supply of at least one in this coating precursor material and this dopant precursor material, to be limited in this coating unit, there is the coating composition of this dopant precursor material to ratio selected by this coating precursor material;

    WithThis coating composition is deposited into be formed through doping coating on substrate,Wherein select this dopant precursor material to the ratio of this coating precursor material to limit the alloy content of gained through the expectation of coating of adulterating to the situation of profile depth.

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