Thin film transistor and manufacturing method thereof, array substrate and display device

Thin film transistor and manufacturing method thereof, array substrate and display device

  • CN 105,097,943 A
  • Filed: 06/24/2015
  • Published: 11/25/2015
  • Est. Priority Date: 06/24/2015
  • Status: Active Application
First Claim
Patent Images

1. a thin-film transistor, comprises grid, active layer, source electrode and drain electrode, it is characterized in that, described source electrode and drain electrode comprise the first conductive layer be arranged on active layer;

  • Wherein;

    In the etching liquid of correspondence, the etch rate of the material of described first conductive layer is greater than the etch rate of the material of described active layer.

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