Strain Ge groove-type gate CMOS (Complementary Metal Oxide Semiconductor) integrated device manufacturing method and CMOS integrated device thereof
Strain Ge groove-type gate CMOS (Complementary Metal Oxide Semiconductor) integrated device manufacturing method and CMOS integrated device thereof
- CN 105,118,809 A
- Filed: 08/28/2015
- Published: 12/02/2015
- Est. Priority Date: 08/28/2015
- Status: Active Application