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Strain Ge groove-type gate CMOS (Complementary Metal Oxide Semiconductor) integrated device manufacturing method and CMOS integrated device thereof

Strain Ge groove-type gate CMOS (Complementary Metal Oxide Semiconductor) integrated device manufacturing method and CMOS integrated device thereof

  • CN 105,118,809 A
  • Filed: 08/28/2015
  • Published: 12/02/2015
  • Est. Priority Date: 08/28/2015
  • Status: Active Application
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