Thin film treatment apparatus

Thin film treatment apparatus

  • CN 105,148,821 A
  • Filed: 06/13/2008
  • Published: 12/16/2015
  • Est. Priority Date: 06/21/2007
  • Status: Active Application
First Claim
Patent Images

1. a film processing device (8), comprises the rotor (16) with at least one cylindrical section (26), at least one scraper blade (32,33,34,35,36,41) be disposed on described cylindrical section, described scraper blade comprises at least two teeth (42,43,44,42'"'"', 43'"'"', 44'"'"')It is characterized in that, the thickness (T) of described scraper blade or described tooth (42,43,44,42'"'"', 43'"'"', 44'"'"') is correspondingly greater than 5mm.

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