Array substrate making method, mask, array substrate and display device

Array substrate making method, mask, array substrate and display device

  • CN 105,185,739 A
  • Filed: 06/26/2015
  • Published: 12/23/2015
  • Est. Priority Date: 06/26/2015
  • Status: Active Application
First Claim
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1. a method for array base palte making, it is characterized in that, the method comprises:

  • The substrate forming source electrode and drain electrode applies negativity organic film;

    By mask plate to the base board to explosure being coated with negativity organic film, and exposure metacoxal plate is developed, remove the negativity organic film of via area;

    Via etch region in described via area is etched, forms via hole;

    After formation via hole, form tin indium oxide ITO pixel electrode.

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