Fixed base station and evaporated device

Fixed base station and evaporated device

  • CN 105,220,124 B
  • Filed: 10/10/2015
  • Issued: 07/13/2018
  • Est. Priority Date: 10/10/2015
  • Status: Active Grant
First Claim
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1. a kind of fixed base station, for the pending substrate to be fixed during pending substrate is deposited,It is characterized in that, the side of the fixed base station towards the pending substrate is provided at least one recess channels, the grooveAt least one distortion measurement unit is provided in channel, the distortion measurement unit is used to wait locating described in vapor deposition in the process measurementManage substrate on the deformation quantity in the corresponding region of the distortion measurement unit;

  • Moving cell is provided in the recess channels, the moving cell is connect with the distortion measurement unit;

    The moving cell is for driving the distortion measurement unit to be moved in the recess channels;

    The fixed base station further includes:

    Position acquisition unit;

    The position acquisition unit is for obtaining the location information of the distortion measurement unit during the motion.

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