Graphene synthesis device and graphene synthesis method using same

Graphene synthesis device and graphene synthesis method using same

  • CN 105,246,588 B
  • Filed: 08/26/2013
  • Issued: 04/24/2020
  • Est. Priority Date: 01/28/2013
  • Status: Active Grant
First Claim
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1. A graphene synthesis apparatus, comprising:

  • a chamber defining an inner space for seating a plurality of substrates arranged to face each other by respective faces thereof;

    a gas supply portion that supplies a carbon-containing gas to the internal space;

    a main heating unit that irradiates the internal space with radiant heat;

    a first auxiliary heating part which is disposed to face one surface of the substrate corresponding to the main heating part, and converts the radiant heat into convective heat and releases the converted convective heat to the inner space; and

    a plurality of second auxiliary heating parts arranged to face at least one surface of the substrate in respective intervals between the plurality of substrates and releasing heat to the internal space after being heated by absorbing the radiant heat and the convective heat,wherein an arrangement direction of the plurality of substrates and the plurality of second auxiliary heating parts is a direction intersecting with a direction of gravity or a direction perpendicular thereto,the plurality of substrates and the plurality of second auxiliary heating portions are all arranged in parallel with each other,a second auxiliary heating part is disposed between adjacent substrates such that the number of the plurality of second auxiliary heating parts is smaller than the number of the plurality of substrates,each of the plurality of second auxiliary heating parts is formed with at least one through-hole.

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