Light source device and exposure device

Light source device and exposure device

  • CN 105,319,862 A
  • Filed: 06/11/2015
  • Published: 02/10/2016
  • Est. Priority Date: 08/02/2014
  • Status: Active Application
First Claim
Patent Images

1. a light supply apparatus, is characterized in that, described light supply apparatus has:

  • 1 laser diode, its injection has the laser of the wavelength characteristic of regulation;

    Other laser diode, its injection has the laser of other wavelength characteristics of the wavelength characteristic being different from described regulation;

    Multiple 1st fibre bundle, it has;

    1 article of the 1st optical fiber, and it is at the incident injection light from described 1 laser diode of incidence end and penetrate at exit end;

    Other the 1st optical fiber, its incidence end incident from described other laser diode injection light and penetrate at exit end;

    And the 2nd optical fiber, it assembles the injection light of described 1 article of the 1st optical fiber and other the 1st optical fiber, the plurality of 1st fibre bundle by described 1 article of the 1st optical fiber and described other the 1st optical fiber outgoing side according to regulation arrangement carry out boundling, assemble this 1 article of the 1st optical fiber and other the 1st optical fiber injection light and make it incide the incidence end of described 2nd optical fiber;

    2nd fibre bundle, it has the 3rd optical fiber of the injection light assembling described 2nd optical fiber, boundling is carried out according to the arrangement of regulation in the outgoing side of multiple 2nd optical fiber in described multiple 1st fibre bundle portion by the 2nd fibre bundle, assembles the injection light of each 2nd optical fiber and makes it incide the incidence end of described 3rd optical fiber;

    AndEfferent, it is connected to the output terminal of described 3rd optical fiber, for exporting outside.

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