Thin film transistor, manufacturing method thereof, array substrate and display device

Thin film transistor, manufacturing method thereof, array substrate and display device

  • CN 105,355,662 A
  • Filed: 11/04/2015
  • Published: 02/24/2016
  • Est. Priority Date: 11/04/2015
  • Status: Active Application
First Claim
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1. a thin-film transistor, comprise substrate and be arranged on described suprabasil oxide semiconductor layer, gate insulator, grid, source electrode and drain electrode, it is characterized in that, described thin-film transistor also comprises groove, and described oxide semiconductor layer is arranged in described groove.

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