Chemical-mechanical polishing composition comprising benzotriazole derivatives as corrosion inhibitors
Chemical-mechanical polishing composition comprising benzotriazole derivatives as corrosion inhibitors
- CN 105,378,011 A
- Filed: 07/01/2014
- Published: 03/02/2016
- Est. Priority Date: 07/11/2013
- Status: Active Grant
- EN CH
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- Pin
