Chemical-mechanical polishing composition comprising benzotriazole derivatives as corrosion inhibitors

Chemical-mechanical polishing composition comprising benzotriazole derivatives as corrosion inhibitors

  • CN 105,378,011 A
  • Filed: 07/01/2014
  • Published: 03/02/2016
  • Est. Priority Date: 07/11/2013
  • Status: Active Grant
First Claim
Patent Images

1. chemically machinery polished (CMP) composition, it comprises:

  • (A) one or more formulas (1) compound;

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