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Thin film permeation barrier system for substrates and devices and method of making the same

Thin film permeation barrier system for substrates and devices and method of making the same

  • CN 105,390,621 A
  • Filed: 08/19/2015
  • Published: 03/09/2016
  • Est. Priority Date: 08/21/2014
  • Status: Active Application
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