Thin film permeation barrier system for substrates and devices and method of making the same

Thin film permeation barrier system for substrates and devices and method of making the same

  • CN 105,390,621 A
  • Filed: 08/19/2015
  • Published: 03/09/2016
  • Est. Priority Date: 08/21/2014
  • Status: Active Application
First Claim
Patent Images

1. a thin barrier film, it comprises:

  • Comprise SiO xc yh zthe first mixing barrier layer, wherein 1≤

    x <

    2,0.001≤

    y≤

    1 and 0.001≤

    z≤

    1;

    With Inorganic second barrier layer, the described first mixing barrier layer of its next-door neighbour is settled.

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