The manufacturing method of metal oxide film and the manufacturing method of transistor

The manufacturing method of metal oxide film and the manufacturing method of transistor

  • CN 105,408,244 B
  • Filed: 06/18/2014
  • Issued: 04/12/2019
  • Est. Priority Date: 08/07/2013
  • Status: Active Grant
First Claim
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1. a kind of manufacturing method of metal oxide film, wherein it has:

  • By the solution coating containing metal-organic complex in the painting process of substrate;

    Obtained film is exposed to the ozone exposure process of ozone;

    WithThe heating process that the film is heated below 180 degree,After the ozone exposure process, it is further equipped with the cleaning process for making the film organic solvent exposure,In the ozone exposure process, the film is selectively exposed to ozone.

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