A kind of pallet and bogey

A kind of pallet and bogey

  • CN 105,448,794 B
  • Filed: 08/13/2014
  • Issued: 07/19/2019
  • Est. Priority Date: 08/13/2014
  • Status: Active Grant
First Claim
Patent Images

1. a kind of pallet, the pallet includes tray body and the insulator in tray body, is set on the insulatorMultiple technique positions for carrying substrates are equipped with, also, are provided with adsorption electrode in the insulator;

  • It is characterized in that, instituteThe quantity and position of the quantity and position and the substrate of stating adsorption electrode correspond, thereunder by each adsorption electrodeIt is electrically connected with DC power supply, the fixed corresponding substrate in a manner of using Electrostatic Absorption, also, the area of the substrate is greater thanThe area of the corresponding adsorption electrode, to block the adsorption electrode, so that the adsorption electrode is apart from described exhaustedThe distance between region upper surface that do not blocked by substrate of edge body is slant range between the two.

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