Inductor with varying thickness

Inductor with varying thickness

  • CN 105,493,208 B
  • Filed: 07/29/2014
  • Issued: 06/30/2020
  • Est. Priority Date: 08/30/2013
  • Status: Active Grant
First Claim
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1. An apparatus, comprising:

  • a substrate; and

    a spiral inductor disposed on the substrate, the spiral inductor being a gradient layer stacked inductor, whereinA first portion of an innermost turn of the spiral inductor has a first thickness in a direction perpendicular to the substrate,a second portion of the innermost turn having a second thickness in a direction perpendicular to the substrate, wherein the second thickness is greater than the first thickness,a third portion of the innermost turn of the spiral inductor has a third thickness in a direction perpendicular to the substrate, wherein the third thickness is greater than the first thickness and the second thickness, anda thickness of the spiral inductor in a direction perpendicular to the substrate increases according to a gradient in the innermost turn from the first thickness to the third thickness.

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