Method for detecting micro-defects of quartz glass

Method for detecting micro-defects of quartz glass

  • CN 105,717,137 B
  • Filed: 01/27/2016
  • Issued: 08/11/2020
  • Est. Priority Date: 01/27/2016
  • Status: Active Grant
First Claim
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1. The method for detecting the micro-defects of the quartz glass is characterized by comprising the following steps of:

  • precisely polishing two light-passing surfaces of a quartz glass sample;

    vertically placing the polished quartz glass sample in a mixed acid solution for corrosion;

    taking out the quartz glass sample after 0.5-2 hours of corrosion, cleaning the quartz glass sample by using deionized water, and observing and detecting the quartz glass sample by using a microscope;

    the etching and observation were repeated for the silica glass sample in accordance with the above procedure until defects in the silica glass sample were observed or no defects were observed until 20 to 30 μ

    m of the thickness of the silica glass sample remained,the mixed acid solution is composed of superior pure hydrofluoric acid and analytically pure acetic acid according to the volume ratio of 1;

    3-3;

    1, the temperature of the mixed acid solution is 25-100 ℃

    , and the temperature of the mixed acid solution is controlled by a water bath or an oil bath;

    the defects are bubbles with the size smaller than 0.01 mm;

    randomly selecting 1-3 quartz glass sheets in the same batch for detection, and then representing the related parameters of the microbubbles in the quartz glass in the batch.

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