Magnetron assembly and magnetron sputtering equipment

Magnetron assembly and magnetron sputtering equipment

  • CN 105,779,952 A
  • Filed: 12/24/2014
  • Published: 07/20/2016
  • Est. Priority Date: 12/24/2014
  • Status: Active Application
First Claim
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1. a magnetron assembly, it is characterised in that include center permanent magnet and the annular permanent magnet being looped around around the permanent magnet of described center, the opposite polarity of described center permanent magnet and described annular permanent magnet;

  • Wherein,Described annular permanent magnet adopts integral structure.

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